JPH0383957U - - Google Patents
Info
- Publication number
- JPH0383957U JPH0383957U JP14573389U JP14573389U JPH0383957U JP H0383957 U JPH0383957 U JP H0383957U JP 14573389 U JP14573389 U JP 14573389U JP 14573389 U JP14573389 U JP 14573389U JP H0383957 U JPH0383957 U JP H0383957U
- Authority
- JP
- Japan
- Prior art keywords
- gate
- semiconductor substrate
- thyristor
- vertical groove
- groove
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims description 4
- 239000000758 substrate Substances 0.000 claims description 4
- 238000005530 etching Methods 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Thyristors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14573389U JPH0383957U (en]) | 1989-12-18 | 1989-12-18 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14573389U JPH0383957U (en]) | 1989-12-18 | 1989-12-18 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPH0383957U true JPH0383957U (en]) | 1991-08-26 |
Family
ID=31692356
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14573389U Pending JPH0383957U (en]) | 1989-12-18 | 1989-12-18 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0383957U (en]) |
-
1989
- 1989-12-18 JP JP14573389U patent/JPH0383957U/ja active Pending
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